PE IR Plan
Infrared Objective Lens for Photo Emission
High-resolution and long WD objective lens designed for high spectral transmittance at NIR range.
Ideal for wafer backside inspection and photo emission application.
Silicon correction is possible.
Ideal for wafer backside inspection and photo emission application.
Silicon correction is possible.
What’s New
Specifications
| Model | PEIR Plan 1X | PEIR Plan 2.5 | PEIR Plan 10X | PEIR Plan 20X | PEIR Plan 50X | PEIR Plan 100X |
|---|---|---|---|---|---|---|
| Magnification | 1.0X | 2.5X | 10X | 20X | 50X | 100X |
| Working Distance | 12mm | 28.0mm | 30.7mm | 12mm | 10mm | 9.5mm |
| Focal Distance | 200mm | 80mm | 20mm | 10mm | 4mm | 2mm |
| NA | 0.03 | 0.1 | 0.27 | 0.5 | 0.6 | 0.71 |
| Resolution | 22.4 µm | 6.7 µm | 2.5 µm | 1.3 µm | 1.1 µm | 0.9 µm |
| Focal Depth | 611 µm | 55 µm | 7.5 µm | 2.2 µm | 1.5 µm | 0.9 µm |
| Wavelength | 800 - 1600nm | 450 - 1600nm | 550 - 1600nm | 800 - 1600nm | 900 - 1600nm | 900 - 1400nm |
*the resolution is calculated as a theorical resolution based on NA of wavelength 1100nm
PE IR-Plan-1x
Image Circle (mm):
24
Magnification:
1x
Working Distance:
12
Focal Length (mm):
200
N.A.:
0.03
RP (μm):
22.4
DOF (μm):
611
Weight (g):
420
24
Magnification:
1x
Working Distance:
12
Focal Length (mm):
200
N.A.:
0.03
RP (μm):
22.4
DOF (μm):
611
Weight (g):
420
PE IR-Plan-2.5x
Image Circle (mm):
24
Magnification:
2.5x
Working Distance:
28
Focal Length (mm):
80
N.A.:
0.1
RP (μm):
6.7
DOF (μm):
55
Weight (g):
300
24
Magnification:
2.5x
Working Distance:
28
Focal Length (mm):
80
N.A.:
0.1
RP (μm):
6.7
DOF (μm):
55
Weight (g):
300
PE IR-Plan-10X
Magnification:
10x
Working Distance:
30.7
N.A.:
0.27
RP (μm):
2.5
DOF (μm):
7.5
10x
Working Distance:
30.7
N.A.:
0.27
RP (μm):
2.5
DOF (μm):
7.5
PE IR-Plan-20x
Image Circle (mm):
24
Magnification:
20x
Working Distance:
12
Focal Length (mm):
10
N.A.:
0.5
RP (μm):
1.3
DOF (μm):
2.2
Weight (g):
430
24
Magnification:
20x
Working Distance:
12
Focal Length (mm):
10
N.A.:
0.5
RP (μm):
1.3
DOF (μm):
2.2
Weight (g):
430
PE IR-Plan-50x
Image Circle (mm):
24
Magnification:
50x
Working Distance:
10.0
Focal Length (mm):
4
N.A.:
0.6
RP (μm):
1.1
DOF (μm):
1.5
Weight (g):
500
24
Magnification:
50x
Working Distance:
10.0
Focal Length (mm):
4
N.A.:
0.6
RP (μm):
1.1
DOF (μm):
1.5
Weight (g):
500
PE IR-Plan-100x
Image Circle (mm):
24
Magnification:
100x
Working Distance:
9.5
Focal Length (mm):
2
N.A.:
0.71
RP (μm):
0.9
DOF (μm):
0.9
Weight (g):
560
24
Magnification:
100x
Working Distance:
9.5
Focal Length (mm):
2
N.A.:
0.71
RP (μm):
0.9
DOF (μm):
0.9
Weight (g):
560