PS-888

PS-888 Prober Microscope

Superscope

It is a high-resolution, high-magnification microscope that is ideal for semiconductor probe stations and LCD assembly processes.
The PS-888L type is equipped with three imaging lenses that transmit wavelengths of 1064nm, 532nm, and 355nm, respectively,
By installing it on a YAG laser irradiation device, it is possible to process semiconductor circuits and LCD layers.

Side camera port specification

The PS-888-TRI type has a camera port installed on the side of the microscope.
The lighting is also a push-in type from the side, and we have adopted Keller lighting that can achieve a low-contrast image with little uneven lighting. The imaging lens is not a switchable type.

What’s New

M. Plan APO 2.5X HR

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M. Plan APO 5X HR

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M. Plan APO 1.5HR

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MODELMIRROR TUBE TYPEMOUNTFOCUS UNIT:STROKE
PS-888Visible LightC-mount+25mm
PS-888LNear-infred to near-violet compatibleLaser mount (N/W)+25mm
PS-888TRINear-infred to near-violet compatibleC-mount/laser mount (N/X)50mm
OPTIONMODEL
Camera AdapterLCA-1
Halogen light source
LED light source
Light guide
FA-100C/FA-150EN
SLBX-15AS
SL-B5 series
Electric revolver45/horizontal
Polarization filterPL-2
Color filterFC-R
FC-G
FC-B
FC-Y
Eyepiece2-888 FWF10XDA
3-888 WF15X
4-888 WF20X
Objective lensM.PlanAPO2.5X
M.PlanAPO5XSB
M.PlanAPO10XSB
M.PlanAPO20XSB
M.PlanAPO50XSB
M.PlanAPO100XSB
StandSTD-67

PS-888

Features
  • This microscope PS-888 is ideal for probe station in the semiconductor and LCD assembly status.
  • This microscope provides high resolution at high magnification and its compact shape delivers good performances and stability when integrated to the instrument.
  • Options such as observation for Bright Field, Differential Interference Contrast (DIC) and polarized filters are provided to this microscope unit to ensure high performance.
  • This microscope is designed for long working distance with large N.A.


Main body: Image lens 1x(486~656)nm
2x(486~656)nm
Turret switching type
Main body: Laser
Objective lens Infinity correction objective lens (M.PlanAPO lens)
Weight 7kg or less
Focus unit: Weight-resistant 45kg
Focus unit: Operation Coarse motion: 1 revolution/4mm
Micromotion: 1 revolution/0.1mm
Manual 1-axis coarse micromotion
External dimensions 192(W) × 352(D) × 365(H) mm

PS-888L

Features
  • PS-888L provides a 3 lens turret with 1X UV laser/visible tube lens, 1X IR laser/visible tube lens and 2X visible tube lens for 355nm, 352nm and 1064nm. B eam-splitter is moved out from the field of view for better laser performance
  • PS-888L can be equipped with YAG laser to cut semiconductor circuit and for LCD substrate repair purposes
  • Its inward revolver has adjustement for parcenter and parfocal


Main body: Image lens 1x(355~532)nm  1x(352~1064)nm
2x(486~656)nm …No laser processing
Turret switching type
Main body: Laser YAG laser (1st, 2nd, 3rd harmonics)
Objective lens Infinity correction objective lens (M.PlanAPO lens)
Weight 7.5kg or less
Focus unit: Weight-resistant 45kg
Focus unit: Operation Coarse motion: 1 revolution/4mm
Micromotion: 1 revolution/0.1mm
Manual 1-axis coarse micromotion
External dimensions 192(W) × 352(D) × 365(H) mm

PS-888-TRI

Features
  • This microscope PS-888 is ideal for probe station in the semiconductor and LCD assembly status
  • This microscope provides high resolution at high magnification and its compact shape delivers good performances and stability when integrated to the instrument.
  • Options such as observation for Bright Field, Differential Interference Contrast (DIC) and polarized filters are provided to this microscope unit to ensure high performance.
  • This microscope is designed for long working distance with large N.A.


Main body: Image lens 1x(355~532)nm  1x(352~1064)nm
2x(486~656)nm …No laser processing
Turret switching type
Main body: Laser YAG laser (1st, 2nd, 3rd harmonics)
Objective lens Infinity correction objective lens (M.PlanAPO lens)
Weight
Focus unit: Weight-resistant 45kg
Focus unit: Operation Rough movement 4mm/rev
Micromotion 0.1mm/rev
External dimensions